Cov khoom
Argon roj rau kev lag luam hluav taws xob (Ar)
| Yam khoom | Cov cuab yeej cuab tam | |
| Argon (Ar) purity (ntim feem) / 10-2≥ | 99.99 9 | 99.992 ib |
| Hydrogen (H2) cov ntsiab lus ( ntim feem) / 10-6≤ | 0.1 | 1 |
| Nitrogen (N2) cov ntsiab lus ( ntim feem) / 10-6≤ | 0.5 | 5 |
| Cov pa oxygen (O2) cov ntsiab lus ( ntim feem) / 10-6≤ | 0.2 | 0.5 |
| Tag nrho cov ntsiab lus ntawm carbon monoxide (CO) thiab carbon dioxide (CO2), (Vaj Huam Sib Luag) / 10-6≤ | Cov pa roj carbon monoxide: 0.1 Cov pa roj carbon dioxide: 0.1 | 0.5 |
| Tag nrho cov hydrocarbon (xws li methane) cov ntsiab lus (ntim feem) / 10-6≤ | 0.1 | 0.5 |
| Dej (H2O) cov ntsiab lus (ntim feem) / 10-6≤ | 0.2 | 0.5 |
| Tag nrho cov ntsiab lus impurity (ntim feem) / 10-6≤ | 1 | 8 |
| Nplej | Pom zoo los ntawm tus neeg muab khoom thiab tus Demander | Pom zoo los ntawm tus neeg muab khoom thiab tus Demander |
| Lus Cim: Cov dej ntsiab lus ntawm cov kua argon yuav tsum ntsuas tom qab gasification | ||
Daim ntawv thov teb: feem ntau yog siv rau purging, tiv thaiv thiab pressurization ntawm lub system. Nws kuj tseem siv tau rau hauv cov tshuaj vapor deposition, sputtering, plasma thiab nquag ion etchant, annealing thiab lwm yam txheej txheem sib txawv, nrog rau hauv hluav taws xob tshwj xeeb sib xyaw roj.
Sau koj cov lus ntawm no thiab xa tuaj rau peb
