Cov khoom
High-purity krypton & Ultrapure krypton (Kr: 5N, 5.5N, 6N)
| Yam khoom | Cov cuab yeej cuab tam | ||
| Siab purity krypton GB/T5829-2006 | Ultrapure krypton | ||
| Kr purity (ntim feem) / 10-2≥ | 99.999 ib | 99.99 5 | 99.99 9 |
| Nitrogen (N2) cov ntsiab lus ( ntim feem) / 10-6≤ | 2 | 1.5 | 0.2 |
| Cov pa oxygen (O2) cov ntsiab lus ( ntim feem) / 10-6≤ | 1.5 (ib2+ Ar) | 0.5 (O2+ Ar) | 0.1 |
| Argon (Ar) cov ntsiab lus (ntim feem) / 10-6≤ | 0.05 Nws | ||
| Hydrogen (H2) cov ntsiab lus ( ntim feem) / 10-6≤ | 0.5 | 0.2 | 0.05 Nws |
| Cov pa roj carbon monoxide (CO) cov ntsiab lus ( ntim feem) / 10-6≤ | 0.3 | 0.1 | 0.05 Nws |
| Cov pa roj carbon dioxide (CO2) cov ntsiab lus ( ntim feem) / 10-6≤ | 0.4 | 0.1 | 0.05 Nws |
| Methane (CH4) cov ntsiab lus ( ntim feem) / 10-6≤ | 0.3 | 0.1 | 0.05 Nws |
| Dej (H2O) cov ntsiab lus (ntim feem) / 10-6≤ | 2 | 1 | 0.2 |
| Xenon (Xe) cov ntsiab lus ( ntim feem) / 10-6≤ | 2 | 1 | 0.2 |
| Fluoride (CF4) cov ntsiab lus ( ntim feem) / 10-6≤ | 1 | 0.2 | 0.05 Nws |
Daim ntawv thov teb: feem ntau yog siv rau hauv kev lag luam semiconductor, hluav taws xob nqus kev lag luam, hluav taws xob lub teeb ci kev lag luam, nrog rau cov roj laser, kev kho mob thiab lwm yam kev lag luam
Sau koj cov lus ntawm no thiab xa tuaj rau peb
