Cov khoom
High purity xenon & Ultra-ntshiab xenon (Xe: 5N, 5.5N, 6N)
| Yam khoom | Cov cuab yeej cuab tam | ||
| High purity xenon GB/T5828-2006 | Ultrapure xenon | ||
| Xenon (Xe) purity ( ntim feem) / 10-2≥ | 99.999 ib | 99.99 5 | 99.99 9 |
| Nitrogen (N2) cov ntsiab lus ( ntim feem) / 10-6≤ | 2.5 | 1.5 | 0.2 |
| Cov pa oxygen (O2) cov ntsiab lus ( ntim feem) / 10-6≤ | 1.5 (ib2+ Ar) | 0.5 (O2+ Ar) | 0.1 |
| Argon (Ar) cov ntsiab lus (ntim feem) / 10-6≤ | 0.05 Nws | ||
| Hydrogen (H2) cov ntsiab lus ( ntim feem) / 10-6≤ | 0.5 | 0.5 | 0.05 Nws |
| Cov pa roj carbon monoxide (CO) cov ntsiab lus ( ntim feem) / 10-6≤ | 0.2 | 0.1 | 0.05 (CO + CO2) |
| Cov ntsiab lus carbon dioxide (CO2) (ntim feem) / 10-6≤ | 0.3 | 0.1 | |
| Methane (CH4) cov ntsiab lus ( ntim feem) / 10-6≤ | 0.3 | 0.1 | 0.05 Nws |
| Dej (H2O) cov ntsiab lus (ntim feem) / 10-6≤ | 2 | 1 | 0.1 |
| Krypton (Kr) cov ntsiab lus ( ntim feem) / 10-6≤ | 2 | 1 | 0.1 |
| Nitrous oxide (N2O) cov ntsiab lus (ntim feem) / 10-6≤ | 0.2 | 0.1 | 0.05 Nws |
| Fluoride (C2F6) cov ntsiab lus ( ntim feem) / 10-6≤ | 0.5 | 0.1 | 0.05 Nws |
| Fluoride (SF6) cov ntsiab lus ( ntim feem) / 10-6≤ | N/A | N/A | 0.05 Nws |
Daim ntawv thov teb: feem ntau yog siv nyob rau hauv semiconductor kev lag luam, aerospace, hluav taws xob lub teeb qhov chaw kev lag luam, kev kho mob, hluav taws xob nqus tsev vacuum, tsaus teeb meem tshawb fawb, laser thiab lwm yam teb.
Sau koj cov lus ntawm no thiab xa tuaj rau peb
