Yam khoom | Cov cuab yeej cuab tam | ||
Ntshiab oxygen | High purity oxygen | Ultrapure oxygen | |
Cov pa oxygen (O2) purity (ntim feem) / 10-2≥ | 99.995 ib | 99.999 ib | 99.99 9 |
Hydrogen (H2) cov ntsiab lus ( ntim feem) / 10-6≤ | 1 | 0.5 | 0.1 |
Argon (Ar) cov ntsiab lus (ntim feem) / 10-6≤ | 10 | 2 | 0.2 |
Nitrogen (N2) cov ntsiab lus ( ntim feem) / 10-6≤ | 20 | 5 | 0.1 |
Cov pa roj carbon dioxide (CO2) cov ntsiab lus ( ntim feem) / 10-6≤ | 1 | 0.5 | 0.1 |
Tag nrho cov ntsiab lus hydrocarbon (ntim feem) (xws li methane) / 10-6≤ | 2 | 0.5 | 0.1 |
Dej (H2O) cov ntsiab lus (ntim feem) / 10-6≤ | 3 | 2 | 0.5 |
Daim ntawv thov teb: feem ntau yog siv rau hauv kev npaj cov qauv roj sib tov, kev tshawb fawb tshawb fawb, tsim cov khoom siv sib xyaw ua ke thiab cov khoom siv hluav taws xob semiconductor, thiab lwm yam kev xav tau siab rau oxygen purity.