Ngwaahịa

Carbon tetrafluoride

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Nkọwa ngwaahịa

FAQ

Mkpado ngwaahịa

Tetrafluoromethane, nke a makwaara dị ka carbon tetrafluoride, bụ fluorocarbon kacha mfe (CF4).Ọ nwere ike njikọ dị oke elu n'ihi ọdịdị nke njikọ carbon-fluorine.Enwere ike kewaa ya dị ka haloalkane ma ọ bụ halomethane.N'ihi ọtụtụ njikọ carbon-fluorine, yana electronegativity nke fluorine kachasị elu, carbon dị na tetrafluoromethane nwere nnukwu ụgwọ akụkụ dị mma nke na-ewusi ma na-ebelata njikọ carbon-fluorine anọ site n'inyekwu agwa ionic.Tetrafluoromethane bụ ikuku griin haus siri ike.

A na-eji tetrafluoromethane eme ihe mgbe ụfọdụ dị ka friji dị ala.A na-eji ya na microfabrication nke eletrọnịkị naanị ma ọ bụ jikọtara ya na oxygen dị ka ihe na-emepụta plasma maka silicon, silicon dioxide, na silicon nitride.

Usoro ọgwụ CF4 Ibu molekụla 88
CAS Mba. 75-73-0 EINECS Mba. 200-896-5
Ebe mgbaze -184 ℃ Ebe na-agwụ ike -128.1 ℃
solubility Na-adịghị edozi na mmiri Njupụta 1.96g/cm³ (-184 ℃)
Ọdịdị Ihe na-enweghị agba, enweghị isi, enweghị ọkụ, gas na-agbakọ Ngwa eji na plasma etching usoro maka dị iche iche integrated sekit, na-ejikwa dị ka laser gas, refrigerant wdg.
Nọmba NJ DOT UN1982 Aha Mbupu DOT/IMO: Tetrafluoromethane, Mpịakọta ma ọ bụ Refrigerant Gas R14
    Klas ihe egwu DOT Klas 2.2
Ihe

Uru, ọkwa I

Uru, ọkwa II

Nkeji

Ịdị ọcha

≥99.999

≥99.9997

%

O2 

≤1.0

≤0.5

ppmv

N2 

≤4.0

≤1.0

ppmv

CO

≤0.1

≤0.1

ppmv

CO2 

≤1.0

≤0.5

ppmv

SF6 

≤0.8

≤0.2

ppmv

Fluorocarbons ndị ọzọ

≤1.0

≤0.5

ppmv

H2O

≤1.0

≤0.5

ppmv

H2

≤1.0

——

ppmv

Acidity

≤0.1

≤0.1

ppmv

* fluorocarbon ndị ọzọ na-ezo aka na C2F6,C3F8

Ihe ndetu
1) data teknụzụ niile egosiri n'elu bụ maka ntụaka gị.
2) A na-anabata nkọwapụta ọzọ maka mkparịta ụka ọzọ.


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