Tūemi | Taonga Hangarau | |
Argon (Ar) parakore (hautau rōrahi)/10-2≥ | 99.9999 | 99.9992 |
Hauwai (H2) ihirangi (hautau rōrahi)/10-6≤ | 0.1 | 1 |
hauota (N2) ihirangi (hautau rōrahi)/10-6≤ | 0.5 | 5 |
hāora (O2) ihirangi (hautau rōrahi)/10-6≤ | 0.2 | 0.5 |
Katoa te ihirangi o te waro haukura (CO) me te hauhā (CO2), (hautau pukapuka)/10-6≤ | Te waro haukura: 0.1 Te hauhā: 0.1 | 0.5 |
Tapeke waiwaro (kua tatauhia e te mewaro) ihirangi (hautanga rōrahi)/10-6≤ | 0.1 | 0.5 |
Wai (H2O) ihirangi (hautau rōrahi)/10-6≤ | 0.2 | 0.5 |
Katoa nga ihirangi poke (hautanga rōrahi)/10-6≤ | 1 | 8 |
witi | Whakaaetia e te Kaituku me te Kaituku | Whakaaetia e te Kaituku me te Kaituku |
Tuhipoka: Ko te ihirangi wai o te argon wai ka ine i muri i te whakaahuru |
mara tono: te nuinga whakamahia mo te purenga, tiaki me te pressurization o te pūnaha. Ka taea hoki te whakamahi i roto i te waipara matū kohu, sputtering, plasma me te hohe katote etchant, annealing me ētahi atu tukanga rerekē, me te hiko motuhake hau whakauru.