Hua
Carbon Tetrafluoride
Ko Tetrafluoromethane, e mohiotia ana ko te tetrafluoride waro, ko te fluorocarbon ngawari (CF4).He tino kaha te herenga na runga i te ahua o te here waro me te pukoro.Ka taea hoki te whakarōpūtia hei haloalkane, halomethane ranei.Na te maha o nga here waro-puru, me te irahiko teitei o te fluorine, ko te waro i roto i te tetrafluoromethane he utu waahanga pai e whakakaha ana, e whakapoto ana i nga here waro-fluorine e wha ma te whakarato i etahi atu ahua katote.Ko te Tetrafluoromethane he hau kati kati.
I etahi wa ka whakamahia te Tetrafluoromethane hei whakamahana mahana iti.Ka whakamahia i roto i te miihini miihini hiko anake, i te whakakotahitanga ranei me te hāora hei etchant plasma mo te silicon, silicon dioxide, me te silicon nitride.
| tātai matū | CF4 | Te taumaha ngota | 88 |
| CAS No. | 75-73-0 | EINECS No. | 200-896-5 |
| Te rewa | -184 ℃ | Ira poroporoaki | -128.1 ℃ |
| whakarewatanga | Karekau ki te wai | Kiato | 1.96g/cm³（-184℃） |
| Te ahua | He hau kore tae, he kakara, kore e mura, he hau kopeke | Taupānga | whakamahia i roto i te tukanga etching plasma mō ngā iahiko whakauru, me te whakamahia hoki rite hau taiaho, refrigerant etc. |
| Tau ID DOT | UN1982 | Ira/IMO TE Ingoa Tukunga: | Tetrafluoromethane, Hau Kōpeke, Rerigerant ranei R14 |
| DOT Te Akomanga Hazard | akomanga 2.2 |
| Tūemi | Uara, kōeke I | Uara, kōeke II | Waeine |
| Maamaa | ≥99.999 | ≥99.9997 | % |
| O2 | ≤1.0 | ≤0.5 | ppmv |
| N2 | ≤4.0 | ≤1.0 | ppmv |
| CO | ≤0.1 | ≤0.1 | ppmv |
| CO2 | ≤1.0 | ≤0.5 | ppmv |
| SF6 | ≤0.8 | ≤0.2 | ppmv |
| Ētahi atu fluorocarbons | ≤1.0 | ≤0.5 | ppmv |
| H2O | ≤1.0 | ≤0.5 | ppmv |
| H2 | ≤1.0 | —— | ppmv |
| Kawakawa | ≤0.1 | ≤0.1 | ppmv |
| *etahi atu fluorocarbons e tohu ana ki a C2F6、C3F8 | |||
Notes
1) Ko nga raraunga hangarau katoa kua tohua i runga ake nei mo to tohutoro.
2) e pai ana etahi atu korero mo etahi atu korero.
