Tūemi | Taonga Hangarau | ||
Xenon parakore teitei GB/T5828-2006 | Xenon Ultrapure | ||
Xenon (Xe) parakore (hautanga rōrahi)/10-2≥ | 99.999 | 99.9995 | 99.9999 |
hauota (N2) ihirangi (hautau rōrahi)/10-6≤ | 2.5 | 1.5 | 0.2 |
hāora (O2) ihirangi (hautau rōrahi)/10-6≤ | 1.5(O2+Ar) | 0.5(O2+Ar) | 0.1 |
Argon (Ar) ihirangi (hautanga rōrahi)/10-6≤ | 0.05 | ||
Hauwai (H2) ihirangi (hautau rōrahi)/10-6≤ | 0.5 | 0.5 | 0.05 |
Ihirangi waro hauota (CO) (hautanga rōrahi)/10-6≤ | 0.2 | 0.1 | 0.05(CO+CO2) |
Te waro hauhā (CO2) ihirangi (hautanga rōrahi)/10-6≤ | 0.3 | 0.1 | |
Mewaro (CH4) ihirangi (hautau rōrahi)/10-6≤ | 0.3 | 0.1 | 0.05 |
Wai (H2O) ihirangi (hautau rōrahi)/10-6≤ | 2 | 1 | 0.1 |
Krypton (Kr) ihirangi (hautanga rōrahi)/10-6≤ | 2 | 1 | 0.1 |
Te waikura hauota (N2O) ihirangi (hautau rōrahi)/10-6≤ | 0.2 | 0.1 | 0.05 |
Pūkōwhai (C2F6) ihirangi (hautau rōrahi)/10-6≤ | 0.5 | 0.1 | 0.05 |
Pūkōwhai (SF6) ihirangi (hautau rōrahi)/10-6≤ | N/A | N/A | 0.05 |
Nga waahanga tono: te nuinga e whakamahia ana i roto i te ahumahi semiconductor, aerospace, hiko hiko rama rama, maimoatanga hauora, hiko hiko, rangahau mea pouri, taiaho me etahi atu mara