Tūemi | Taonga Hangarau | ||
hāora parakore | High pure oxygen | hāora parakore | |
hāora (O2) parakore (hautau rōrahi)/10-2≥ | 99.995 | 99.999 | 99.9999 |
Hauwai (H2) ihirangi (hautau rōrahi)/10-6≤ | 1 | 0.5 | 0.1 |
Argon (Ar) ihirangi (hautanga rōrahi)/10-6≤ | 10 | 2 | 0.2 |
hauota (N2) ihirangi (hautau rōrahi)/10-6≤ | 20 | 5 | 0.1 |
Te hauhā (CO2) ihirangi (hautau rōrahi)/10-6≤ | 1 | 0.5 | 0.1 |
Tapeke o te ihirangi waiwaro (hautau rōrahi) (kua tatauhia e te mewaro)/10-6≤ | 2 | 0.5 | 0.1 |
Wai (H2O) ihirangi (hautau rōrahi)/10-6≤ | 3 | 2 | 0.5 |
mara tono: te nuinga whakamahia i roto i te faaineineraa o te ranunga hau paerewa, rangahau pūtaiao, hanga o iahiko integrated me ngā pūrere semiconductor, me ētahi atu mara ki te whakaritenga tiketike mō te pure hāora.