Lihlahisoa

Tetrafluoride ea carbon

Tlhaloso e Khutšoanyane:


Lintlha tsa Sehlahisoa

LBH

Li-tag tsa Sehlahisoa

Tetrafluoromethane, eo hape e tsejoang e le carbon tetrafluoride, ke fluorocarbon e bonolo ka ho fetisisa (CF4).E na le matla a holimo haholo a tlamahano ka lebaka la mofuta oa bond ea carbon-fluorine.E ka boela ea hlalosoa e le haloalkane kapa halomethane.Ka lebaka la li-bond tse ngata tsa carbon-fluorine, le electronegativity e phahameng ka ho fetisisa ea fluorine, carbon e tetrafluoromethane e na le tefiso e ntle e ntle e matlafatsang le ho khutsufatsa li-bond tse 'nè tsa carbon-fluorine ka ho fana ka sebopeho se eketsehileng sa ionic.Tetrafluoromethane ke khase e futhumatsang lefatše e matla.

Ka linako tse ling Tetrafluoromethane e sebelisoa e le sehatsetsi se tlase sa mocheso.E sebelisoa ho microfabrication ea elektronike feela kapa hammoho le oksijene e le plasma etchant bakeng sa silicon, silicon dioxide, le silicon nitride.

Foromo ea lik'hemik'hale CF4 Boima ba molek'hule 88
Nomoro ea CAS. 75-73-0 EINECS No. 200-896-5
Sebaka se qhibilihang -184 ℃ Boling point -128.1 ℃
ho qhibiliha Ha e kenelle ka metsing Botenya 1.96g/cm³ (-184℃)
Ponahalo Khase e se nang 'mala, e sa nkheng, e sa cheng, e hatellehang Kopo e sebelisoa ts'ebetsong ea plasma etching bakeng sa lipotoloho tse fapaneng tse kopaneng, hape e sebelisoa joalo ka khase ea laser, sehatsetsi joalo-joalo.
Nomoro ea ID ea DOT UN1982 DOT/IMO SHIPPING NAME: Tetrafluoromethane, Khase e Hatelitsoeng kapa e Refrigerant R14
    Sehlopha sa kotsi sa DOT Sehlopha sa 2.2
Ntho

Boleng, sehlopha sa I

Boleng, sehlopha sa II

Yuniti

Bohloeki

≥99.999

≥99.9997

%

O2 

≤1.0

≤0.5

ppmv

N2 

≤4.0

≤1.0

ppmv

CO

≤0.1

≤0.1

ppmv

CO2 

≤1.0

≤0.5

ppmv

SF6 

≤0.8

≤0.2

ppmv

Li-fluorocarbons tse ling

≤1.0

≤0.5

ppmv

H2O

≤1.0

≤0.5

ppmv

H2

≤1.0

—-

ppmv

Asiti

≤0.1

≤0.1

ppmv

*Li-fluorocarbon tse ling li bua ka C2F6, C3F8

Lintlha
1) lintlha tsohle tsa tekheniki tse bontšitsoeng ka holimo ke tsa referense ea hau.
2) litlhaloso tse ling li amohelehile bakeng sa lipuisano tse ling.


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