Element | Texnik mulk |
Yuqori toza geliy | |
Geliy He sofligi (hajm ulushi)/10-2≥ | 99.999 |
Neon (Ne) tarkibi (hajm ulushi)/10-6≤ | 4 |
Vodorod (H2) mazmuni (hajm ulushi)/10-6 ≤ | 1 |
Kislorod (O2) mazmuni (hajm ulushi)/10-6 ≤ | 1 |
Argon (Ar) tarkibi (hajm ulushi)/10-6 ≤ | |
Azot (N2) mazmuni (hajm ulushi)/10-6 ≤ | 2 |
Uglerod oksidi (CO) miqdori (hajm ulushi)/10-6≤ | 0,5 |
Karbonat angidrid (CO2) mazmuni (hajm ulushi)/10-6≤ | 0,5 |
Metan (CH4) mazmuni (hajm ulushi)/10-6≤ | 0,5 |
Suv H2O mazmuni (hajm ulushi)/10-6≤ | 3 |
Jami jurnal mazmuni/10-6≤ | 10 |