Element | Texnik mulk | ||
Yuqori toza kripton GB/T5829-2006 | Ultra toza kripton | ||
Kr tozaligi (hajm ulushi)/10-2≥ | 99.999 | 99.9995 | 99.9999 |
Azot (N2) mazmuni (hajm ulushi)/10-6≤ | 2 | 1.5 | 0.2 |
Kislorod (O2) mazmuni (hajm ulushi)/10-6≤ | 1,5 (O2+Ar) | 0,5 (O2+Ar) | 0.1 |
Argon (Ar) tarkibi (hajm ulushi)/10-6≤ | 0,05 | ||
Vodorod (H2) mazmuni (hajm ulushi)/10-6≤ | 0,5 | 0.2 | 0,05 |
Uglerod oksidi (CO) miqdori (hajm ulushi)/10-6≤ | 0.3 | 0.1 | 0,05 |
Karbonat angidrid (CO2) mazmuni (hajm ulushi)/10-6≤ | 0.4 | 0.1 | 0,05 |
Metan (CH4) mazmuni (hajm ulushi)/10-6≤ | 0.3 | 0.1 | 0,05 |
Suv (H2O) mazmuni (hajm ulushi)/10-6≤ | 2 | 1 | 0.2 |
Ksenon (Xe) tarkibi (hajm ulushi)/10-6≤ | 2 | 1 | 0.2 |
Ftorid (CF4) mazmuni (hajm ulushi)/10-6≤ | 1 | 0.2 | 0,05 |
Qo'llash sohasi: asosan yarimo'tkazgich sanoati, elektr vakuum sanoati, elektr yorug'lik manbalari sanoati, shuningdek lazer gazi, tibbiy sog'liqni saqlash va boshqa sohalarda qo'llaniladi