Element | Texnik mulk | ||
Toza azot | Yuqori toza azot | Ultra toza azot | |
Azot (N2) tozaligi (hajm ulushi)/10-2≥ | 99,99 | 99.999 | 99.9999 |
Kislorod (O2) mazmuni (hajm ulushi)/10-6≤ | 50 | 3 | 0.1 |
Argon (Ar) tarkibi (hajm ulushi)/10-6≤ | - | - | 2 |
Vodorod (H2) mazmuni (hajm ulushi)/10-6≤ | 15 | 1 | 0.1 |
Uglerod oksidi (CO) miqdori (hajm ulushi)/10-6≤ | 5 | 1 | 0.1 |
Karbonat angidrid (CO2) mazmuni (hajm ulushi)/10-6≤ | 10 | 1 | 0.1 |
Metan (CH4) mazmuni (hajm ulushi)/10-6≤ | 5 | 1 | 0.1 |
Suv (H2O) mazmuni (hajm ulushi)/10-6≤ | 15 | 3 | 0,5 |