Into | Ipropati yobuGcisa | |
Argon (Ar) ubunyulu (iqhezu umthamo)/10-2≥ | 99.9999 | 99.9992 |
IHydrojeni (H2) umxholo (iqhezu lomthamo)/10-6≤ | 0.1 | 1 |
Nitrogen (N2) umxholo (iqhezu lomthamo)/10-6≤ | 0.5 | 5 |
Ioksijini (O2) umxholo (iqhezu lomthamo)/10-6≤ | 0.2 | 0.5 |
Isiqulatho esipheleleyo se-carbon monoxide (CO) kunye ne-carbon dioxide (CO2), (iqhezu lomthamo)/10-6≤ | Ikharbhon monoxide: 0.1 Ikharbhon dayoksayidi: 0.1 | 0.5 |
Iyonke i-hydrocarbon (ebalwe yi-methane) umxholo (iqhezu lomthamo)/10-6≤ | 0.1 | 0.5 |
Amanzi (H2O) umxholo (iqhezu lomthamo)/10-6≤ | 0.2 | 0.5 |
Isiqulatho esipheleleyo sokungcola (iqhezu lomthamo)/10-6≤ | 1 | 8 |
Uziinkozo | Ivunywe nguMboneleli kunye noMfuni | Ivunywe nguMboneleli kunye noMfuni |
Qaphela: Umxholo wamanzi we-argon yolwelo uya kulinganiswa emva kokuguqulwa kwegesi |
Intsimi yesicelo: ikakhulu isetyenziselwa ukuhlanjululwa, ukukhuselwa kunye noxinzelelo lwenkqubo. Isenokusetyenziswa kwakhona kwikhemikhali yokubeka umphunga, ukutshiza, iplasma kunye ne-ion etchant esebenzayo, ukudibanisa kunye nezinye iinkqubo ezahlukeneyo, kunye nakwigesi ekhethekileyo exubeneyo yombane.