Nkan | Ohun-ini imọ-ẹrọ | ||
Ga ti nw xenon GB/T5828-2006 | Ultrapure xenon | ||
Xenon (Xe) mimọ (ida iwọn didun)/10-2≥ | 99.999 | 99.9995 | 99.9999 |
Nitrojiini (N2) akoonu (ida iwọn didun)/10-6≤ | 2.5 | 1.5 | 0.2 |
Atẹ́gùn (O2) akoonu (ida iwọn didun)/10-6≤ | 1.5(O2+Ar) | 0.5(O2+Ar) | 0.1 |
Argon (Ar) akoonu (ida iwọn didun)/10-6≤ | 0.05 | ||
Hydrogen (H2) akoonu (ida iwọn didun)/10-6≤ | 0.5 | 0.5 | 0.05 |
Erogba monoxide (CO) akoonu (ida iwọn didun)/10-6≤ | 0.2 | 0.1 | 0.05 (CO+CO2) |
Erogba oloro (CO2) akoonu (ida iwọn didun)/10-6≤ | 0.3 | 0.1 | |
Methane (CH4) akoonu (ida iwọn didun)/10-6≤ | 0.3 | 0.1 | 0.05 |
Omi (H2O) akoonu (ida iwọn didun)/10-6≤ | 2 | 1 | 0.1 |
Krypton (Kr) akoonu (ida iwọn didun)/10-6≤ | 2 | 1 | 0.1 |
Afẹfẹ ọksid (N2O) akoonu (ida iwọn didun)/10-6≤ | 0.2 | 0.1 | 0.05 |
Fluoride (C2F6) akoonu (ida iwọn didun)/10-6≤ | 0.5 | 0.1 | 0.05 |
Fluoride (SF6) akoonu (ida iwọn didun)/10-6≤ | N/A | N/A | 0.05 |
Awọn aaye ohun elo: lilo akọkọ ni ile-iṣẹ semikondokito, afẹfẹ, ile-iṣẹ orisun ina ina, itọju iṣoogun, igbale ina, iwadii ọrọ dudu, laser ati awọn aaye miiran