
Tetrafluoromethane, also known as carbon tetrafluoride, is the simplest fluorocarbon (CF4). It has a very high bonding strength due to the nature of the carbon–fluorine bond. It can also be classified as a haloalkane or halomethane. Because of the multiple carbon–fluorine bonds, and the highest electronegativity of fluorine, the carbon in tetrafluoromethane has a significant positive partial charge which strengthens and shortens the four carbon–fluorine bonds by providing additional ionic character. Tetrafluoromethane is a potent greenhouse gas.
Tetrafluoromethane is sometimes used as a low temperature refrigerant. It is used in electronics microfabrication alone or in combination with oxygen as a plasma etchant for silicon, silicon dioxide, and silicon nitride.
| Chemical formula | CF4 | Molecular weight | 88 | 
| CAS No. | 75-73-0 | EINECS No. | 200-896-5 | 
| Melting point | -184℃ | Boling point | -128.1℃ | 
| solubility | Insoluble in water | Density | 1.96g/cm³(-184℃) | 
| Appearance | A colorless, odorless, nonflammable, compressible gas | Application | used in plasma etching process for various integrated circuits, and used also as laser gas, refrigerant etc. | 
| DOT ID Number | UN1982 | DOT/IMO SHIPPING NAME: | Tetrafluoromethane, Compressed or Refrigerant Gas R14 | 
| DOT Hazard Class | Class 2.2 | 
| Item | Value, grade I | Value, grade II | Unit | 
| Purity | ≥99.999 | ≥99.9997 | % | 
| O2 | ≤1.0 | ≤0.5 | ppmv | 
| N2 | ≤4.0 | ≤1.0 | ppmv | 
| CO | ≤0.1 | ≤0.1 | ppmv | 
| CO2 | ≤1.0 | ≤0.5 | ppmv | 
| SF6 | ≤0.8 | ≤0.2 | ppmv | 
| Other fluorocarbons | ≤1.0 | ≤0.5 | ppmv | 
| H2O | ≤1.0 | ≤0.5 | ppmv | 
| H2 | ≤1.0 | —— | ppmv | 
| Acidity | ≤0.1 | ≤0.1 | ppmv | 
| *other fluorocarbons refer to C2F6、C3F8 | |||
Notes 
1) all the technical data indicated above are for your reference. 
2) alternative specification is welcome for further discussion. 
 
               By Emma from Hungary - 2018.09.08 17:09
 By Emma from Hungary - 2018.09.08 17:09
               By Grace from Burundi - 2017.01.28 18:53
 By Grace from Burundi - 2017.01.28 18:53