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Chinese Professional Hexafluoride Gas - Carbon Tetrafluoride – YANXA
Chinese Professional Hexafluoride Gas - Carbon Tetrafluoride – YANXA Detail:
Tetrafluoromethane, also known as carbon tetrafluoride, is the simplest fluorocarbon (CF4). It has a very high bonding strength due to the nature of the carbon–fluorine bond. It can also be classified as a haloalkane or halomethane. Because of the multiple carbon–fluorine bonds, and the highest electronegativity of fluorine, the carbon in tetrafluoromethane has a significant positive partial charge which strengthens and shortens the four carbon–fluorine bonds by providing additional ionic character. Tetrafluoromethane is a potent greenhouse gas.
Tetrafluoromethane is sometimes used as a low temperature refrigerant. It is used in electronics microfabrication alone or in combination with oxygen as a plasma etchant for silicon, silicon dioxide, and silicon nitride.
| Chemical formula | CF4 | Molecular weight | 88 |
| CAS No. | 75-73-0 | EINECS No. | 200-896-5 |
| Melting point | -184℃ | Boling point | -128.1℃ |
| solubility | Insoluble in water | Density | 1.96g/cm³（-184℃） |
| Appearance | A colorless, odorless, nonflammable, compressible gas | Application | used in plasma etching process for various integrated circuits, and used also as laser gas, refrigerant etc. |
| DOT ID Number | UN1982 | DOT/IMO SHIPPING NAME: | Tetrafluoromethane, Compressed or Refrigerant Gas R14 |
| DOT Hazard Class | Class 2.2 |
| Item |
Value, grade I |
Value, grade II |
Unit |
| Purity |
≥99.999 |
≥99.9997 |
% |
| O2 |
≤1.0 |
≤0.5 |
ppmv |
| N2 |
≤4.0 |
≤1.0 |
ppmv |
| CO |
≤0.1 |
≤0.1 |
ppmv |
| CO2 |
≤1.0 |
≤0.5 |
ppmv |
| SF6 |
≤0.8 |
≤0.2 |
ppmv |
| Other fluorocarbons |
≤1.0 |
≤0.5 |
ppmv |
| H2O |
≤1.0 |
≤0.5 |
ppmv |
| H2 |
≤1.0 |
—— |
ppmv |
| Acidity |
≤0.1 |
≤0.1 |
ppmv |
|
*other fluorocarbons refer to C2F6、C3F8 |
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Notes
1) all the technical data indicated above are for your reference.
2) alternative specification is welcome for further discussion.
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Being supported by an highly developed and specialist IT team, we could give technical support on pre-sales & after-sales service for Chinese Professional Hexafluoride Gas - Carbon Tetrafluoride – YANXA , The product will supply to all over the world, such as: South Korea, India, Czech Republic, On today, we've got customers from all over the world, including USA, Russia, Spain, Italy, Singapore, Malaysia, Thailand, Poland, Iran and Iraq. The mission of our company is to deliver the highest quality products with best price. We've been looking forward to doing business with you!
By Odelia from Swansea - 2017.06.19 13:51
This supplier stick to the principle of "Quality first, Honesty as base", it is absolutely to be trust.
By Ruth from Belgium - 2017.10.13 10:47
