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  • PriceList for Sulphur Hexafluoride Uses - Carbon Tetrafluoride – YANXA

PriceList for Sulphur Hexafluoride Uses - Carbon Tetrafluoride – YANXA

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PriceList for Sulphur Hexafluoride Uses - Carbon Tetrafluoride – YANXA Detail:

Tetrafluoromethane, also known as carbon tetrafluoride, is the simplest fluorocarbon (CF4). It has a very high bonding strength due to the nature of the carbon–fluorine bond. It can also be classified as a haloalkane or halomethane. Because of the multiple carbon–fluorine bonds, and the highest electronegativity of fluorine, the carbon in tetrafluoromethane has a significant positive partial charge which strengthens and shortens the four carbon–fluorine bonds by providing additional ionic character. Tetrafluoromethane is a potent greenhouse gas.

Tetrafluoromethane is sometimes used as a low temperature refrigerant. It is used in electronics microfabrication alone or in combination with oxygen as a plasma etchant for silicon, silicon dioxide, and silicon nitride.

Chemical formula CF4 Molecular weight 88
CAS No. 75-73-0 EINECS No. 200-896-5
Melting point -184℃ Boling point -128.1℃
solubility Insoluble in water Density 1.96g/cm³（-184℃）
Appearance A colorless, odorless, nonflammable, compressible gas Application used in plasma etching process for various integrated circuits, and used also as laser gas, refrigerant etc.
DOT ID Number UN1982 DOT/IMO SHIPPING NAME: Tetrafluoromethane, Compressed or Refrigerant Gas R14
    DOT Hazard Class Class 2.2
Item

Value, grade I

Value, grade II

Unit
Purity

≥99.999

≥99.9997

%
O2 

≤1.0

≤0.5

ppmv
N2 

≤4.0

≤1.0

ppmv
CO

≤0.1

≤0.1

ppmv
CO2 

≤1.0

≤0.5

ppmv
SF6 

≤0.8

≤0.2

ppmv
Other fluorocarbons

≤1.0

≤0.5

ppmv
H2O

≤1.0

≤0.5

ppmv
H2

≤1.0

——

ppmv
Acidity

≤0.1

≤0.1

ppmv

*other fluorocarbons refer to C2F6、C3F8

Notes
1) all the technical data indicated above are for your reference.
2) alternative specification is welcome for further discussion.

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