
|
Item |
Technical Property |
| Argon (Ar) purity (volume fraction)/10-2≥ |
99.999 |
| Hydrogen (H2) content (volume fraction)/10-6≤ |
0.5 |
| Oxygen (O2) content (volume fraction)/10-6≤ |
1.5 |
| Nitrogen (N2) content (volume fraction)/10-6≤ |
4 |
| Methane (CH4) content (volume fraction)/10-6≤ |
0.4 |
| Carbon monoxide (CO) content (volume fraction)/10-6≤ |
0.3 |
| Carbon dioxide (CO2) content (volume fraction)/10-6≤ |
0.3 |
| Water (H2O) content (volume fraction)/10-6≤ |
3 |
| Note: Liquid argon does not detect moisture content |