Item |
Technical Property |
High purity neon |
|
Neon (Ne) purity (volume fraction)/10-2≥ |
99.999 |
Helium (He) content (volume fraction)/10-6≤ |
6 |
Hydrogen (H2) content (volume fraction)/10-6≤ |
1 |
Oxygen+argon (calculated by oxygen) (O2+Ar) content (volume fraction)/10-6≤ |
1 |
Nitrogen (N2) content (volume fraction) zz/10-6≤ |
2 |
Carbon monoxide (CO) content (volume fraction)/10-6≤ |
0.2 |
Carbon dioxide (CO2) content (volume fraction)/10-6≤ |
0.2 |
Methane (CH4) content (volume fraction)/10-6≤ |
0.1 |
Water (H2O) content (volume fraction)/10-6≤ |
2 |
Total impurity content (volume fraction)/10-6≤ |
10 |