Products
Pure oxygen，High purity oxygen，Ultra-pure oxygen (O2)
|
Item |
Technical Property |
||
|
Pure oxygen |
High purity oxygen |
Ultrapure oxygen |
|
| Oxygen (O2) purity (volume fraction)/10-2≥ |
99.995 |
99.999 |
99.9999 |
| Hydrogen (H2) content (volume fraction)/10-6≤ |
1 |
0.5 |
0.1 |
| Argon (Ar) content (volume fraction)/10-6≤ |
10 |
2 |
0.2 |
| Nitrogen (N2) content (volume fraction)/10-6≤ |
20 |
5 |
0.1 |
| Carbon dioxide (CO2) content (volume fraction)/10-6≤ |
1 |
0.5 |
0.1 |
| Total hydrocarbon content (volume fraction) (calculated by methane)/10-6≤ |
2 |
0.5 |
0.1 |
| Water (H2O) content (volume fraction)/10-6≤ |
3 |
2 |
0.5 |
Application field: mainly used in the preparation of standard gas mixture, scientific research, production of integrated circuits and semiconductor devices, and other fields with high requirements for oxygen purity.
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