Kayayyaki
Carbon Tetrafluoride
Tetrafluoromethane, kuma aka sani da carbon tetrafluoride, shine mafi sauƙin fluorocarbon (CF4). Yana da ƙarfin haɗin gwiwa sosai saboda yanayin haɗin carbon-fluorine. Hakanan ana iya rarraba shi azaman haloalkane ko halomethane. Saboda nau'ikan haɗin carbon-fluorine da yawa, da mafi girman electronegativity na fluorine, carbon a cikin tetrafluoromethane yana da ingantaccen caji mai ƙarfi wanda ke ƙarfafawa da rage haɗin haɗin carbon-fluorine guda huɗu ta hanyar samar da ƙarin halayen ionic. Tetrafluoromethane shine iskar gas mai ƙarfi.
Tetrafluoromethane wani lokaci ana amfani dashi azaman sanyi mai ƙarancin zafin jiki. Ana amfani dashi a cikin microfabrication na lantarki kadai ko a hade tare da oxygen a matsayin wani abu na plasma don silicon, silicon dioxide, da silicon nitride.
| Tsarin sinadaran | CF4 | Nauyin kwayoyin halitta | 88 |
| CAS No. | 75-73-0 | EINECS No. | 200-896-5 |
| Wurin narkewa | -184 ℃ | Ma'ana mai ƙarfi | -128.1 |
| narkewa | Mara narkewa a cikin ruwa | Yawan yawa | 1.96g/cm³ (-184℃) |
| Bayyanar | Gas mara launi, mara wari, mara ƙonewa, iskar gas | Aikace-aikace | Ana amfani da shi a cikin tsarin etching na plasma don haɗaɗɗun da'irori daban-daban, kuma ana amfani dashi azaman iskar gas, refrigerant da sauransu. |
| Lambar ID DOT | UN1982 | DOT/IMO SUNAN SHIRI: | Tetrafluoromethane, Matsi ko Refrigerant Gas R14 |
| Babban darajar DOT Hazard | Darasi na 2.2 |
| Abu | daraja, daraja I | daraja, daraja II | Naúrar |
| Tsafta | ≥99.999 | ≥99.9997 | % |
| O2 | ≤1.0 | ≤0.5 | ppmv |
| N2 | ≤4.0 | ≤1.0 | ppmv |
| CO | ≤0.1 | ≤0.1 | ppmv |
| CO2 | ≤1.0 | ≤0.5 | ppmv |
| SF6 | ≤0.8 | ≤0.2 | ppmv |
| Sauran fluorocarbons | ≤1.0 | ≤0.5 | ppmv |
| H2O | ≤1.0 | ≤0.5 | ppmv |
| H2 | ≤1.0 | -- | ppmv |
| Acidity | ≤0.1 | ≤0.1 | ppmv |
| * sauran fluorocarbons suna nufin C2F6,C3F8 | |||
Bayanan kula
1) duk bayanan fasaha da aka nuna a sama don tunani ne.
2) madadin bayani yana maraba don ƙarin tattaunawa.
