Imikhiqizo
I-Carbon Tetrafluoride
I-Tetrafluoromethane, eyaziwa nangokuthi i-carbon tetrafluoride, iyi-fluorocarbon (CF4) elula kunazo zonke.Inamandla okubopha aphezulu kakhulu ngenxa yemvelo yebhondi ye-carbon-fluorine.Ingabuye ihlukaniswe njenge-haloalkane noma i-halomethane.Ngenxa yamabhondi e-carbon-fluorine amaningi, kanye ne-electronegativity ephakeme kakhulu ye-fluorine, ikhabhoni eku-tetrafluoromethane inengxenye ebalulekile yokushaja eqinisa futhi ifinyeze amabhondi amane e-carbon-fluorine ngokunikeza uhlamvu lwe-ionic eyengeziwe.I-Tetrafluoromethane iyigesi ebamba ukushisa enamandla.
I-Tetrafluoromethane ngezinye izikhathi isetshenziswa njengesiqandisi esiphansi sokushisa.Isetshenziswa ku-electronics microfabrication iyodwa noma ihlanganiswe nomoya-mpilo njenge-plasma etchant ye-silicon, i-silicon dioxide, ne-silicon nitride.
| Ifomula yamakhemikhali | CF4 | Isisindo samangqamuzana | 88 |
| Inombolo ye-CAS. | 75-73-0 | I-EINECS No. | 200-896-5 |
| Iphoyinti lokuncibilika | -184℃ | Iphoyinti le-Boling | -128.1℃ |
| ukuncibilika | Ayincibiliki emanzini | Ukuminyana | 1.96g/cm³ (-184℃) |
| Ukubukeka | Igesi engenambala, engenaphunga, engashi, ecindezelayo | Isicelo | esetshenziswa kwinqubo yokufaka i-plasma kumasekethe ahlukahlukene ahlanganisiwe, futhi asetshenziswa njengegesi ye-laser, isiqandisi njll. |
| Inombolo ye-ID ye-DOT | I-UN1982 | I-DOT/IMO SHIPPING IGAMA: | I-Tetrafluoromethane, Igesi Ecindezelwe noma Eyisiqandisi R14 |
| Ikilasi le-DOT Hazard | Ikilasi 2.2 |
| Into | Inani, ibanga I | Inani, ibanga II | Iyunithi |
| Ubumsulwa | ≥99.999 | ≥99.9997 | % |
| O2 | ≤1.0 | ≤0.5 | ppmv |
| N2 | ≤4.0 | ≤1.0 | ppmv |
| CO | ≤0.1 | ≤0.1 | ppmv |
| CO2 | ≤1.0 | ≤0.5 | ppmv |
| SF6 | ≤0.8 | ≤0.2 | ppmv |
| Amanye ama-fluorocarbons | ≤1.0 | ≤0.5 | ppmv |
| H2O | ≤1.0 | ≤0.5 | ppmv |
| H2 | ≤1.0 | —- | ppmv |
| I-Acidity | ≤0.1 | ≤0.1 | ppmv |
| *amanye ama-fluorocarbon abhekisa ku-C2F6, C3F8 | |||
Amanothi
1) yonke idatha yobuchwepheshe eboniswe ngenhla ingeyereferensi yakho.
2) okunye ukucaciswa kwamukelekile ukuze kuxoxiswane kabanzi.
