Iimveliso

Ikhabhon Tetrafluoride

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FAQ

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I-Tetrafluoromethane, nekwaziwa ngokuba yi-carbon tetrafluoride, yeyona fluorocarbon elula (CF4).Inamandla okudibanisa kakhulu ngenxa yendalo yebhondi ye-carbon-fluorine.Inokuthi ihlelwe njenge-haloalkane okanye i-halomethane.Ngenxa yeebhondi ezininzi ze-carbon-fluorine, kunye ne-electronegativity ephezulu ye-fluorine, ikhabhoni ekwi-tetrafluoromethane inexabiso elibalulekileyo elilungileyo eliqinisayo kwaye lifinyeze iibhondi ezine ze-carbon-fluorine ngokubonelela ngophawu olongezelelweyo lwe-ionic.I-Tetrafluoromethane yigesi enamandla ye-greenhouse.

I-Tetrafluoromethane ngamanye amaxesha isetyenziswa njengefriji yobushushu obuphantsi.Isetyenziswa kwi-electronics microfabrication yodwa okanye idityaniswe ne-oksijini njenge-plasma etchant ye-silicon, i-silicon dioxide, kunye ne-silicon nitride.

Ifomula yemichiza CF4 Ubunzima bemolekyuli 88
Inombolo yeCAS. 75-73-0 I-EINECS No. 200-896-5
Indawo yokunyibilika -184℃ Indawo yeBoling -128.1℃
ukunyibilika Ayinyibiliki emanzini Ukuxinana 1.96g/cm³(-184℃)
Imbonakalo Irhasi engenambala, engenavumba, engatshayo, ecinezelekayo Isicelo isetyenziswe kwinkqubo yokufakwa kweplasma kwiisekethe ezahlukeneyo ezidibeneyo, kwaye isetyenziswe njengerhasi yelaser, ifriji njl.
Inombolo ye-ID ye-DOT UN1982 I-DOT/IGAMA LOKUTHUNYELWA KWE-IMO: I-Tetrafluoromethane, iGesi eQiniweyo okanye eFrijiweyo R14
    Iklasi ye-DOT yengozi Iklasi 2.2
Into

Ixabiso, ibakala I

Ixabiso, ibakala II

Iyunithi

Ubunyulu

≥99.999

≥99.9997

%

O2 

≤1.0

≤0.5

ppmv

N2 

≤4.0

≤1.0

ppmv

CO

≤0.1

≤0.1

ppmv

CO2 

≤1.0

≤0.5

ppmv

SF6 

≤0.8

≤0.2

ppmv

Ezinye ii-fluorocarbons

≤1.0

≤0.5

ppmv

H2O

≤1.0

≤0.5

ppmv

H2

≤1.0

—-

ppmv

Ubumuncu

≤0.1

≤0.1

ppmv

*ezinye iifluorocarbons zibhekisa kuC2F6, C3F8

Amanqaku
I-1) yonke idatha yobugcisa eboniswe ngasentla yereferensi yakho.
2) enye ingcaciso yamkelekile kwingxoxo eqhubekayo.


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