Iimveliso

ICarbon Tetrafluoride

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Iinkcukacha Product

FAQ

Iimpawu zemveliso

I-Tetrafluoromethane, ekwabizwa ngokuba yi-carbon tetrafluoride, yeyona fluorocarbon ilula (CF4). Inamandla amakhulu kakhulu okudibanisa ngenxa yendalo ye-carbon-fluorine bond. Inokuhlelwa njenge-haloalkane okanye i-halomethane. Ngenxa yeebhondi ezininzi ze-carbon-fluorine, kunye ne-electronegativity ephezulu ye-fluorine, ikhabhoni kwi-tetrafluoromethane inentlawulo ebalulekileyo ebonakalayo eqinisa kunye nokunciphisa iibhondi ezine ze-carbon-fluorine ngokubonelela ngeempawu ze-ionic ezongezelelweyo. I-Tetrafluoromethane yirhasi yegreenhouse enamandla.

I-Tetrafluoromethane ngamanye amaxesha isetyenziswa njengefriji yeqondo lobushushu elisezantsi. Isetyenziswa kwi-elektroniki microfabrication yodwa okanye ngokudibeneyo neoksijini njengeplasma etchant yesilicon, isilicon dioxide, kunye nesilicon nitride.

Ifomula yemichiza ICF4 Ubunzima beMolekyuli 88
CAS Hayi. 75-73-0 I-EINECS Hayi. 200-896-5
Indawo yokunyibilika -184 ℃ Indawo yokubopha -128.1 ℃
ukunyibilika Ayinyibiliki emanzini Ukuxinana 1.96g / cm³ (-184 ℃)
Inkangeleko Irhasi engenambala, engenavumba, engenakutsha, enokutsha Ukusetyenziswa isetyenziselwa inkqubo yeplasma yokucoca iisekethe ezahlukeneyo, kwaye isetyenziswe njengegesi ye-laser, ifriji njl.
Inombolo yesazisi yeDOT UN1982 I-DOT / IMO IGAMA LOKUTHUMELA: I-Tetrafluoromethane, icinezelwe okanye iRefriji yeGesi R14
    Iklasi yeengozi zeDOT Udidi 2.2
Umba

Ixabiso, ibakala I

Ixabiso, ibakala II

Iyunithi

Ucoceko

Ixabiso eliphantsi

Ixabiso eliphantsi

%

O2 

.01.0

-0.5

ppmv

N2 

4.0

.01.0

ppmv

CO

-0.1

-0.1

ppmv

CO2 

.01.0

-0.5

ppmv

SF6 

-0.8

-0.2

ppmv

Ezinye iifluorocarbon

.01.0

-0.5

ppmv

H2O

.01.0

-0.5

ppmv

H2

.01.0

——

ppmv

Ubumuncu

-0.1

-0.1

ppmv

* Ezinye iifluorocarbon zibhekisa kuC2F6. C3F8

Amanqaku
1) yonke idatha yezobuchwephesha eboniswe apha ngasentla yeyakho ireferensi.
2) enye indlela eyamkelweyo yamkelekile kwingxoxo eyongezelelweyo.


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