Cov khoom
Cov pa roj carbon tetrafluoride
Tetrafluoromethane, tseem hu ua carbon tetrafluoride, yog qhov yooj yim tshaj plaws fluorocarbon (CF4).Nws muaj kev sib raug zoo siab heev vim qhov xwm ntawm carbon-fluorine daim ntawv cog lus.Nws tuaj yeem raug faib ua haloalkane lossis halomethane.Vim muaj ntau yam carbon-fluorine bonds, thiab lub siab tshaj plaws electronegativity ntawm fluorine, cov pa roj carbon nyob rau hauv tetrafluoromethane muaj ib tug tseem ceeb zoo ib feem nqi uas ntxiv dag zog thiab shortens plaub carbon-fluorine bonds los ntawm muab ntxiv ionic cim.Tetrafluoromethane yog lub tsev cog khoom muaj zog.
Tetrafluoromethane yog qee zaum siv los ua cov tub yees txias.Nws yog siv nyob rau hauv electronics microfabrication ib leeg los yog ua ke nrog oxygen raws li ib tug plasma etchant rau silicon, silicon dioxide, thiab silicon nitride.
| Tshuaj formula | CF 4 | Molecular hnyav | 88 |
| CAS Nr. | 75-73-0 ib | EINECS No. | 200-896-5 |
| Melting point | -184 ℃ | Boling point | -128.1 ℃ |
| solubility | Insoluble hauv dej | Qhov ntom | 1.96g / cm³ (-184 ℃) |
| Qhov tshwm sim | Tsis muaj xim, tsis muaj ntxhiab, tsis muaj hluav taws xob, compressible gas | Daim ntawv thov | siv nyob rau hauv plasma etching txheej txheem rau ntau yam kev sib xyaw ua ke, thiab siv kuj yog laser roj, tub yees thiab lwm yam. |
| DOT ID naj npawb | UN 1982 | DOT / IMO Shipping Lub Npe: | Tetrafluoromethane, Compressed lossis Refrigerant Gas R14 |
| DOT Hazard Class | Chav Kawm 2.2 |
| Yam khoom | Tus nqi, qib I | Tus nqi, qib II | Chav tsev |
| Purity | ≥99.999 | ≥99.9997 | % |
| O2 | ≤1.0 | ≤0.5 | ppmv ua |
| N2 | ≤4.0 | ≤1.0 | ppmv ua |
| CO | ≤0.1 | ≤0.1 | ppmv ua |
| CO2 | ≤1.0 | ≤0.5 | ppmv ua |
| SF6 | ≤ 0.8 | ≤0.2 | ppmv ua |
| Lwm cov fluorocarbons | ≤1.0 | ≤0.5 | ppmv ua |
| H2O | ≤1.0 | ≤0.5 | ppmv ua |
| H2 | ≤1.0 | —— | ppmv ua |
| Acidity | ≤0.1 | ≤0.1 | ppmv ua |
| * Lwm cov fluorocarbons xa mus rau C2F6, C3F8 | |||
Sau ntawv
1) tag nrho cov ntaub ntawv kev qhia saum toj no yog rau koj siv.
2) lwm qhov tshwj xeeb yog txais tos rau kev sib tham ntxiv.
