Awọn ọja
Erogba Tetrafluoride
Tetrafluoromethane, ti a tun mọ si tetrafluoride carbon, jẹ fluorocarbon ti o rọrun julọ (CF4). O ni agbara isọpọ giga pupọ nitori iseda ti mnu erogba – fluorine. O tun le pin si bi haloalkane tabi halomethane. Nitori awọn ifunmọ erogba – fluorine pupọ, ati elekitironegativity ti fluorine ti o ga julọ, erogba inu tetrafluoromethane ni idiyele apa kan rere pataki eyiti o mu lagbara ati kikuru awọn ifunmọ erogba – fluorine mẹrin nipa fifun ni afikun ohun kikọ ionic. Tetrafluoromethane jẹ eefin eefin ti o lagbara.
Tetrafluoromethane ni a lo nigba miiran bi itutu otutu kekere. O ti wa ni lo ni Electronics microfabrication nikan tabi ni apapo pẹlu atẹgun bi a pilasima echant fun silikoni, silikoni oloro, ati silikoni nitride.
| Ilana kemikali | CF4 | Ìwúwo molikula | 88 |
| CAS No. | 75-73-0 | EINECS No. | 200-896-5 |
| Ojuami yo | -184 ℃ | Boling ojuami | -128.1 ℃ |
| solubility | Ailopin ninu omi | iwuwo | 1.96g/cm³(-184℃) |
| Ifarahan | Aini awọ, olfato, ti kii flammable, gaasi compressible | Ohun elo | lo ninu pilasima etching ilana fun orisirisi ese iyika, ati ki o lo tun bi lesa gaasi, refrigerant ati be be lo. |
| DOT ID Nọmba | UN1982 | DOT/ IMO ORUKO SOWO: | Tetrafluoromethane, Fisinuirindigbindigbin tabi Gaasi firiji R14 |
| DOT Ewu Class | Kilasi 2.2 |
| Nkan | Iye, ipele I | Iye, ite II | Ẹyọ |
| Mimo | ≥99.999 | ≥99.9997 | % |
| O2 | ≤1.0 | ≤0.5 | ppmv |
| N2 | ≤4.0 | ≤1.0 | ppmv |
| CO | ≤0.1 | ≤0.1 | ppmv |
| CO2 | ≤1.0 | ≤0.5 | ppmv |
| SF6 | ≤0.8 | ≤0.2 | ppmv |
| Awọn fluorocarbons miiran | ≤1.0 | ≤0.5 | ppmv |
| H2O | ≤1.0 | ≤0.5 | ppmv |
| H2 | ≤1.0 | —— | ppmv |
| Akitiyan | ≤0.1 | ≤0.1 | ppmv |
| * Awọn fluorocarbons miiran tọka si C2F6,C3F8 | |||
Awọn akọsilẹ
1) gbogbo data imọ-ẹrọ ti o tọka loke wa fun itọkasi rẹ.
2) yiyan sipesifikesonu jẹ kaabo fun siwaju fanfa.
